@misc{indiciaec328dcfd9bb1,
  title = {Focused ion beam nanofabrication: a comparison with conventional processing techniques.},
  author = {R M Langford},
  year = {2006},
  doi = {10.1166/jnn.2006.111},
  url = {https://pubmed.ncbi.nlm.nih.gov/16573118/},
  note = {Source identifier: 16573118}
}