TY  - RPRT
TI  - Focused ion beam nanofabrication: a comparison with conventional processing techniques.
AU  - R M Langford
PY  - 2006
DO  - 10.1166/jnn.2006.111
UR  - https://pubmed.ncbi.nlm.nih.gov/16573118/
ID  - 16573118
ER  -