@misc{indiciae45400d87766f, title = {Molecular depth profiling with cluster ion beams.}, author = {Juan Cheng and Andreas Wucher and Nicholas Winograd}, year = {2006}, doi = {10.1021/jp0573341}, url = {https://pubmed.ncbi.nlm.nih.gov/16623517/}, note = {Source identifier: 16623517} }