@misc{indiciaeca2a24647577,
  title = {Modeling, simulation, and open-loop control of a continuous facesheet MEMS deformable mirror.},
  author = {Curtis R Vogel and Qiang Yang},
  year = {2006},
  doi = {10.1364/josaa.23.001074},
  url = {https://pubmed.ncbi.nlm.nih.gov/16642184/},
  note = {Source identifier: 16642184}
}