TY  - RPRT
TI  - Modeling, simulation, and open-loop control of a continuous facesheet MEMS deformable mirror.
AU  - Curtis R Vogel
AU  - Qiang Yang
PY  - 2006
DO  - 10.1364/josaa.23.001074
UR  - https://pubmed.ncbi.nlm.nih.gov/16642184/
ID  - 16642184
ER  -