@misc{indiciae24701c9ebc64,
  title = {Microscale features and surface chemical functionality patterned by electron beam lithography: a novel route to poly(dimethylsiloxane) (PDMS) stamp fabrication.},
  author = {Matthew T Russell and Liam S C Pingree and Mark C Hersam and Tobin J Marks},
  year = {2006},
  doi = {10.1021/la060319i},
  url = {https://pubmed.ncbi.nlm.nih.gov/16831018/},
  note = {Source identifier: 16831018}
}