TY  - RPRT
TI  - Microscale features and surface chemical functionality patterned by electron beam lithography: a novel route to poly(dimethylsiloxane) (PDMS) stamp fabrication.
AU  - Matthew T Russell
AU  - Liam S C Pingree
AU  - Mark C Hersam
AU  - Tobin J Marks
PY  - 2006
DO  - 10.1021/la060319i
UR  - https://pubmed.ncbi.nlm.nih.gov/16831018/
ID  - 16831018
ER  -