@misc{indiciae2e43a2012367, title = {Sample preparation for precise and quantitative electron holographic analysis of semiconductor devices.}, author = {Myung-Geun Han and Jing Li and Qianghua Xie and Peter Fejes and James Conner and Bill Taylor and Martha R McCartney}, year = {2006}, doi = {10.1017/s1431927606060351}, url = {https://pubmed.ncbi.nlm.nih.gov/16842641/}, note = {Source identifier: 16842641} }