TY - RPRT TI - Sample preparation for precise and quantitative electron holographic analysis of semiconductor devices. AU - Myung-Geun Han AU - Jing Li AU - Qianghua Xie AU - Peter Fejes AU - James Conner AU - Bill Taylor AU - Martha R McCartney PY - 2006 DO - 10.1017/s1431927606060351 UR - https://pubmed.ncbi.nlm.nih.gov/16842641/ ID - 16842641 ER -