TY  - RPRT
TI  - Normal-incidence generalized ellipsometry using the two-modulator generalized ellipsometry microscope.
AU  - Gerald E Jellison
AU  - John D Hunn
AU  - Christopher M Rouleau
PY  - 2006
DO  - 10.1364/ao.45.005479
UR  - https://pubmed.ncbi.nlm.nih.gov/16855646/
ID  - 16855646
ER  -