@misc{indiciaefbe469d95641, title = {Systematic design approach for capacitively coupled microelectromechanical filters.}, author = {Ari T Alastalo and Ville Kaajakari}, year = {2006}, doi = {10.1109/tuffc.2006.1678194}, url = {https://pubmed.ncbi.nlm.nih.gov/16964916/}, note = {Source identifier: 16964916} }