TY - RPRT TI - Systematic design approach for capacitively coupled microelectromechanical filters. AU - Ari T Alastalo AU - Ville Kaajakari PY - 2006 DO - 10.1109/tuffc.2006.1678194 UR - https://pubmed.ncbi.nlm.nih.gov/16964916/ ID - 16964916 ER -