@misc{indiciaece3dfe10b0a5,
  title = {Polarization modulation imaging ellipsometer.},
  author = {Soichi Otsuki and Mitsuru Ishikawa},
  year = {2007},
  doi = {10.1364/ol.32.000130},
  url = {https://pubmed.ncbi.nlm.nih.gov/17186040/},
  note = {Source identifier: 17186040}
}