@misc{indiciae0b6fc5a42bbd,
  title = {Recent developments in nanofabrication using focused ion beams.},
  author = {Ampere A Tseng},
  year = {2005},
  doi = {10.1002/smll.200500113},
  url = {https://pubmed.ncbi.nlm.nih.gov/17193371/},
  note = {Source identifier: 17193371}
}