TY  - RPRT
TI  - Recent developments in nanofabrication using focused ion beams.
AU  - Ampere A Tseng
PY  - 2005
DO  - 10.1002/smll.200500113
UR  - https://pubmed.ncbi.nlm.nih.gov/17193371/
ID  - 17193371
ER  -