@misc{indiciaed9788fae586e,
  title = {Recent developments in nanofabrication using ion projection lithography.},
  author = {Ampere A Tseng},
  year = {2005},
  doi = {10.1002/smll.200500050},
  url = {https://pubmed.ncbi.nlm.nih.gov/17193492/},
  note = {Source identifier: 17193492}
}