TY  - RPRT
TI  - Recent developments in nanofabrication using ion projection lithography.
AU  - Ampere A Tseng
PY  - 2005
DO  - 10.1002/smll.200500050
UR  - https://pubmed.ncbi.nlm.nih.gov/17193492/
ID  - 17193492
ER  -