TY - RPRT TI - Water-soluble sacrificial layers for surface micromachining. AU - Vincent Linder AU - Byron D Gates AU - Declan Ryan AU - Babak A Parviz AU - George M Whitesides PY - 2005 DO - 10.1002/smll.200400159 UR - https://pubmed.ncbi.nlm.nih.gov/17193516/ ID - 17193516 ER -