@misc{indiciae81c2e87360b9,
  title = {Error analysis in inverse scatterometry. I. Modeling.},
  author = {Rayan M Al-Assaad and Dale M Byrne},
  year = {2007},
  doi = {10.1364/josaa.24.000326},
  url = {https://pubmed.ncbi.nlm.nih.gov/17206249/},
  note = {Source identifier: 17206249}
}