TY  - RPRT
TI  - Error analysis in inverse scatterometry. I. Modeling.
AU  - Rayan M Al-Assaad
AU  - Dale M Byrne
PY  - 2007
DO  - 10.1364/josaa.24.000326
UR  - https://pubmed.ncbi.nlm.nih.gov/17206249/
ID  - 17206249
ER  -