@misc{indiciae9a4b02888219, title = {A silicon-based, three-dimensional neural interface: manufacturing processes for an intracortical electrode array.}, author = {P K Campbell and K E Jones and R J Huber and K W Horch and R A Normann}, year = {1991}, doi = {10.1109/10.83588}, url = {https://pubmed.ncbi.nlm.nih.gov/1937509/}, note = {Source identifier: 1937509} }