TY - RPRT TI - A silicon-based, three-dimensional neural interface: manufacturing processes for an intracortical electrode array. AU - P K Campbell AU - K E Jones AU - R J Huber AU - K W Horch AU - R A Normann PY - 1991 DO - 10.1109/10.83588 UR - https://pubmed.ncbi.nlm.nih.gov/1937509/ ID - 1937509 ER -