@misc{indiciae212bfd40f923,
  title = {Backscattered electron imaging for high resolution surface scanning electron microscopy with a new type YAG-detector.},
  author = {P Walther and R Autrata and Y Chen and J B Pawley},
  year = {1991},
  url = {https://pubmed.ncbi.nlm.nih.gov/1947922/},
  note = {Source identifier: 1947922}
}