TY  - RPRT
TI  - Backscattered electron imaging for high resolution surface scanning electron microscopy with a new type YAG-detector.
AU  - P Walther
AU  - R Autrata
AU  - Y Chen
AU  - J B Pawley
PY  - 1991
UR  - https://pubmed.ncbi.nlm.nih.gov/1947922/
ID  - 1947922
ER  -