@misc{indiciae84fb86155f83,
  title = {Rapid plan view TEM sample preparation for semiconductor grain size analysis.},
  author = {M W Cole and E S Zakar},
  year = {1991},
  doi = {10.1002/jemt.1060190114},
  url = {https://pubmed.ncbi.nlm.nih.gov/1960568/},
  note = {Source identifier: 1960568}
}