TY  - RPRT
TI  - Rapid plan view TEM sample preparation for semiconductor grain size analysis.
AU  - M W Cole
AU  - E S Zakar
PY  - 1991
DO  - 10.1002/jemt.1060190114
UR  - https://pubmed.ncbi.nlm.nih.gov/1960568/
ID  - 1960568
ER  -