@misc{indiciaed74a99159674,
  title = {Microfabrication techniques for integrated sensors and microsystems.},
  author = {K D Wise and K Najafi},
  year = {1991},
  doi = {10.1126/science.1962192},
  url = {https://pubmed.ncbi.nlm.nih.gov/1962192/},
  note = {Source identifier: 1962192}
}