TY  - RPRT
TI  - Microfabrication techniques for integrated sensors and microsystems.
AU  - K D Wise
AU  - K Najafi
PY  - 1991
DO  - 10.1126/science.1962192
UR  - https://pubmed.ncbi.nlm.nih.gov/1962192/
ID  - 1962192
ER  -