TY  - RPRT
TI  - Early results using high-resolution, low-voltage, low-temperature SEM.
AU  - J B Pawley
AU  - P Walther
AU  - S J Shih
AU  - M Malecki
PY  - 1991
DO  - 10.1111/j.1365-2818.1991.tb03093.x
UR  - https://pubmed.ncbi.nlm.nih.gov/2038037/
ID  - 2038037
ER  -