TY  - RPRT
TI  - A device for precise alignment of electron beam and sample in the scanning electron microscope.
AU  - E D Gibson
AU  - J D Verhoeven
PY  - 1977
DO  - 10.1088/0022-3735/10/10/029
UR  - https://pubmed.ncbi.nlm.nih.gov/299712/
ID  - 299712
ER  -