@misc{indiciae8c36fbc55f2e,
  title = {Solid-state micro sensors.},
  author = {M Esashi and T Matsuo},
  year = {1987},
  doi = {10.1007/978-94-009-3361-3\_13},
  url = {https://pubmed.ncbi.nlm.nih.gov/3627026/},
  note = {Source identifier: 3627026}
}