@misc{indiciaee93d070b2d1b,
  title = {High resolution microchemical analysis using soft X-ray lithographic techniques.},
  author = {J W McGowan and B Borwein and J A Medeiros and T Beveridge and J D Brown and E Spiller and R Feder and J Topalian and W Gudat},
  year = {1979},
  doi = {10.1083/jcb.80.3.732},
  url = {https://pubmed.ncbi.nlm.nih.gov/379016/},
  note = {Source identifier: 379016}
}