@misc{indiciaec0421137f140,
  title = {Semi-microscanning device using a miniature silicon-lithium semi-conductor probe.},
  author = {E Meyer and J C Challier and J Sternberg},
  year = {1972},
  doi = {10.1016/0020-708x(72)90068-3},
  url = {https://pubmed.ncbi.nlm.nih.gov/5034329/},
  note = {Source identifier: 5034329}
}