@misc{indiciaee562730f8d2f,
  title = {Observation of semiconductor elements using scanning electron microscope.},
  author = {H Kimura and H Higuchi and M Maki and H Tamura},
  year = {1966},
  url = {https://pubmed.ncbi.nlm.nih.gov/5965881/},
  note = {Source identifier: 5965881}
}