TY  - RPRT
TI  - Observation of semiconductor elements using scanning electron microscope.
AU  - H Kimura
AU  - H Higuchi
AU  - M Maki
AU  - H Tamura
PY  - 1966
UR  - https://pubmed.ncbi.nlm.nih.gov/5965881/
ID  - 5965881
ER  -