TY  - RPRT
TI  - Double-axis rotary replication for deep-etching.
AU  - Y Shibata
AU  - T Arima
AU  - T Yamamoto
PY  - 1984
DO  - 10.1111/j.1365-2818.1984.tb02552.x
UR  - https://pubmed.ncbi.nlm.nih.gov/6512852/
ID  - 6512852
ER  -