@misc{indiciaea5b3a4320f95,
  title = {[Sandblasting instead of etching?].},
  author = {W Wiedemann and H G Klinger and B Hübers and F Topitsch},
  year = {1982},
  url = {https://pubmed.ncbi.nlm.nih.gov/6756888/},
  note = {Source identifier: 6756888}
}