@misc{indiciaefda98d82ad57,
  title = {Microlithography by using neutral metastable atoms and self-assembled monolayers.},
  author = {K K Berggren and A Bard and J L Wilbur and J D Gillaspy and A G Helg and J J McClelland and S L Rolston and W D Phillips and M Prentiss and G M Whitesides},
  year = {1995},
  doi = {10.1126/science.7652572},
  url = {https://pubmed.ncbi.nlm.nih.gov/7652572/},
  note = {Source identifier: 7652572}
}