@misc{indiciae988e24ff4be1,
  title = {Micromachining technology and biosensors.},
  author = {I Karube and K Ikebukuro and Y Murakami and K Yokoyama},
  year = {1995},
  doi = {10.1111/j.1749-6632.1995.tb19935.x},
  url = {https://pubmed.ncbi.nlm.nih.gov/7785838/},
  note = {Source identifier: 7785838}
}