TY - RPRT TI - Micromachining technology and biosensors. AU - I Karube AU - K Ikebukuro AU - Y Murakami AU - K Yokoyama PY - 1995 DO - 10.1111/j.1749-6632.1995.tb19935.x UR - https://pubmed.ncbi.nlm.nih.gov/7785838/ ID - 7785838 ER -