@misc{indiciaef9c2881320d9, title = {Microfabrication in silicon microphysiometry.}, author = {G T Baxter and L J Bousse and T D Dawes and J M Libby and D N Modlin and J C Owicki and J W Parce}, year = {1994}, url = {https://pubmed.ncbi.nlm.nih.gov/8070104/}, note = {Source identifier: 8070104} }