@misc{indiciae7957f6f02450,
  title = {Microfabrication and microsensors.},
  author = {S Shoji and M Esashi},
  doi = {10.1007/bf02918525},
  url = {https://pubmed.ncbi.nlm.nih.gov/8215338/},
  note = {Source identifier: 8215338}
}