@misc{indiciae63cff4196152,
  title = {Selected area polishing for precision TEM sample preparation.},
  author = {J B Liu and B M Tracy and R Gronsky},
  year = {1993},
  doi = {10.1002/jemt.1070260209},
  url = {https://pubmed.ncbi.nlm.nih.gov/8241552/},
  note = {Source identifier: 8241552}
}