@misc{indiciae9acb77a96849,
  title = {XTEM sample preparation technique for n-type compound semiconductors using photochemical etching.},
  author = {S Tanaka and H Fujii and M Hibino},
  year = {1996},
  doi = {10.1002/(sici)1097-0029(19961101)35:4<363::aid-jemt10>3.0.co;2-t},
  url = {https://pubmed.ncbi.nlm.nih.gov/8987033/},
  note = {Source identifier: 8987033}
}