TY  - RPRT
TI  - XTEM sample preparation technique for n-type compound semiconductors using photochemical etching.
AU  - S Tanaka
AU  - H Fujii
AU  - M Hibino
PY  - 1996
DO  - 10.1002/(sici)1097-0029(19961101)35:4<363::aid-jemt10>3.0.co;2-t
UR  - https://pubmed.ncbi.nlm.nih.gov/8987033/
ID  - 8987033
ER  -