TY - RPRT TI - A silicon bidirectional flow sensor for measuring respiratory flow. AU - M J van Putten AU - M H van Putten AU - A F van Putten AU - J C Pompe AU - H A Bruining PY - 1997 DO - 10.1109/10.552250 UR - https://pubmed.ncbi.nlm.nih.gov/9214800/ ID - 9214800 ER -