@misc{indiciae94ad365db00b,
  title = {Impurity diffusion in a semi-infinite region.},
  author = {S Harris},
  year = {1989},
  doi = {10.1103/physreva.39.2738},
  url = {https://pubmed.ncbi.nlm.nih.gov/9901553/},
  note = {Source identifier: 9901553}
}