@misc{indiciaed0fff068593f,
  title = {Surface roughness at the Si(100)-SiO2 interface.},
  author = {SM Goodnick and DK Ferry and CW Wilmsen and Z Liliental and D Fathy and OL Krivanek},
  year = {1985},
  doi = {10.1103/physrevb.32.8171},
  url = {https://pubmed.ncbi.nlm.nih.gov/9936996/},
  note = {Source identifier: 9936996}
}