TY - RPRT TI - Silicide formation at the Ti/Si(111) interface: Diffusion parameters and behavior at elevated temperatures. AU - SA Chambers AU - DM Hill AU - F Xu AU - JH Weaver PY - 1987 DO - 10.1103/physrevb.35.634 UR - https://pubmed.ncbi.nlm.nih.gov/9941446/ ID - 9941446 ER -