@misc{indiciae2bd402ca0a49,
  title = {Temperature effects in atomic diffusion in silicon.},
  author = {ST Pantelides},
  year = {1987},
  doi = {10.1103/physrevb.36.3462},
  url = {https://pubmed.ncbi.nlm.nih.gov/9943267/},
  note = {Source identifier: 9943267}
}